Not clear in the photos but likely moles. Appears to be Eastern moles in your case. There are two types of moles in Michigan, making their presence known differently, but all are highly destructive to lawns. Moles have been visibly very active over winter.
Read more here: https://www.canr.msu.edu/news/caution_moles_at_work
And here: https://www.canr.msu.edu/news/moles_in_the_lawn
Unfortunately trapping is the only sure control method that works and there are a variety of traps on the market, none particularly used friendly.
I have included more photos, with a yardstick so you have a better idea of their size. The holes and center of the mounds are 1/4 -1/2 inch in diameter at the most. Can moles make this many small holes in the lawn? There are no raised tunnel areas Unser these mounds. We do have some normal mole sized tunnels in our lawn.
Skunks, also known to do considerable lawn damage. It can get worse if moles are present too, much worse. Moles make the runs and skunks often come through later and rip the surface tunnels open for worms or grubs. Raccoons can do the same and that damage is often even uglier yet. Both are nocturnal so the mess will be created overnight while you are sleeping. read more here: https://www.canr.msu.edu/news/the_usual_suspects_for_yard_and_garden_damage
Another 'Expert' has reminded that the issue could also be emerging insects, of which there are many. Read more in the next two links: https://ask.extension.org/questions/418320
The last photos sent seemed to be even more consistent with animal damage messiness but you can decide for yourself. Whatever the issue, there wasn't anything you could have done about it anyway.